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EMRS Spring Meeting - 2013
Christian Koller (C.M. Koller)
"Influence of B and Fe on the structure and morphology of arc evaporated (Al,Cr)2O3 thin films."
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(Al,Cr)2O3 coatings are known for their enhanced mechanical, tribological and thermal properties. However, stabilising the desired corundum (?) structure during low temperature cathodic arc evaporation turned out to be challenging. Furthermore, recent studies on depositing (Al0.7Cr0.3)2O3 showed that due to the reactive process in oxygen atmosphere Al-rich oxide islands are formed at the target surface, influencing the arcing behaviour as well as the resulting film quality. Within this study we investigate the influence of small amounts of B and Fe on the target oxide island formation and their suitability to stabilise (Al0.7Cr0.3)2O3 in its solid solution ? structure. Therefore powder metallurgical AlCrFe and AlCrB targets, with B and Fe contents ranging from 1 to 5 at%, were cathodic arc evaporated in oxygen atmosphere and investigated in detail. Our results show that with increasing B content the oxide formation on the target surface can be reduced significantly and a densification in the film morphology can be obtained. However, at high B contents the resulting coating shows a structural change from a pronounced crystalline fcc to an XRD- amorphous-like structure. In contrast, alloying Fe indicated to have no influence on the target oxide island formation. Nevertheless, detailed XRD and TEM investigations demonstrate that even low amounts of Fe promote the formation of a non-cubic crystalline structure, allowing for thermal stable alumina-based oxide coatings.

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2011 - 2018 - Christian Doppler Laboratory for Application Oriented Coating Development